Experiment,numerical and atomistic simulations on mechanical behaviors of single crystal silicon in

• 作 者: 张明福;闫润泽;刘洋;王文均;韩杰才;
• 机 构: 哈尔滨工业大学
• 出 处: 第17届全国晶体生长与材料学术会议
• 发表日期: 2015年期

　　To investigate micro/nano mechanical behaviors and anisotropism of monocrystalline silicon,nanoindentation tests,finite element numerical simulation and the first-principle calculations are used to analyze elastic and plastic properties of single crystal silicon(100),(110)and(111)planes in nanoindentation.