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Preparation of Co-Doped Silicon and Aluminum Amorphous Carbon Films with Superior Tribological Perfo
【机 构】
：
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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