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Acidic gases in ambient air are known to deteriorate realty, destroy ecosystem, and adverse to human health.The potential of acidic air pollution around the Hsinchu Science-based Industrial Park (HSIP) has always been a public concern as large amounts of inorganic acids were used by the semiconductor and photoelectronic manufacturing facilities in HSIP.Analytical method with low detection limits and free of interferences from low-carbon organic acids is warranted.An ion chromatograph-based method for determining trace gaseous inorganic acids and particulates was developed.