Characterization of structure and distortion in manganese ions implanted the TiO2 thin films

来源 :9th International Conference on Computer Siumlaation of Radi | 被引量 : 0次 | 上传用户：genye

【作者】

：

Peng Ding[1] Fa-Min Liu[1] Xin-An Yang[2] Jian-Qi Li[2]

【机构】

：

DepartmentofPhysics,SchoolofScience,BeijingUniversityofAeronauticsandAstronautics,Beijing100083,Peop

【出处】

：

9th International Conference on Computer Siumlaation of Radi

【发表日期】

：

2008年10期

【关键词】

：

structure distortion manganese ions implanted TiO2 thin films magnetron sputteri

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Characterization of structure and distortion in manganese ions implanted the TiO2 thin films

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