【摘 要】
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Background, Motivation and Objective Because SH-SAW can propagate without the energy leakage into liquid, it is suitable for the liquid sensor to measure conductivity. (11-20) oriented ZnO films whose
【机 构】
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Wave electronics research center, Laboratory of Ultrasonic Electronics, Doshisha university, Kyoto,J
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Background, Motivation and Objective Because SH-SAW can propagate without the energy leakage into liquid, it is suitable for the liquid sensor to measure conductivity. (11-20) oriented ZnO films whose c-axis is oriented parallel to the substrate plane can excite SH-SAW. We have demonstrated the excitation of SH-SAW using the ZnO film[1]. At the electrically conductive interface, SH-SAW velocity decreases due to the weak of piezoelectric stiffening effect. Therefore, the conductivity of liquid can be detected as the SAW velocity change. In this study, we detected the electrical conductivity of liquid using the SH-SAW sensor.
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