Research on detection technology of microstructure of optical surface based on total integrated scat

• 作 者: C.Wang Q.Wang G.Ding L.Zhao
• 机 构: ChangchunUniversityofScienceandTechnology,China
• 出 处: 2014年光子与光学工程国际会议暨西部光子学学术会议
• 发表日期: 2014年10期
• 关键词: optical element total integrated scattering surface roughness subsurface damage

　　This paper proposes that surface roughness of optical element was detected using total integrated scattering method,Meanwhile,establishing the relational model between surface roughness and subsurface damage to get the depth of subsurface damage rapidly and accurately after we measured surface roughness so as to achieve the goal of detection of optical elements surface microstructure.