Influence of Argon/Hydrogen Ratio on Boron-doped Characteristics of P-type Hydrogenated Nanocrystall

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：yourzhu

【作者】

：

Xueyu Zhang Aimin Wu Shaofei Shi Fuwen Qin

【机构】

：

Key Laboratory of Materials Modification,Dalian University of Technology,Dalian 116024,China;School

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Ar/H2 P-type nc-Si∶H ECR-PECVD Langmuir

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Influence of Argon/Hydrogen Ratio on Boron-doped Characteristics of P-type Hydrogenated Nanocrystall

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