【摘 要】
：
Background, Motivation and Objective ScAlN has been attracted as a potential piezoelectric material for BAW and SAW resonators. The kt 2 of the ScAlN film near the phase boundary was approximately 200
【机 构】
：
Nagoya Institute of Technology, Japan Waseda Univ
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Background, Motivation and Objective ScAlN has been attracted as a potential piezoelectric material for BAW and SAW resonators. The kt 2 of the ScAlN film near the phase boundary was approximately 200 ％ of that of pure AlN single crystal [1].
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