【摘 要】
：
We are developing flow reactor suitable for the direct synthesis of hydrogen peroxide.Recently,we successfully developed the reactor with the size of 12 cm X 18 cm,capable of producing 10 wt%of hydrog
【机 构】
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Tecnisco Ltd.,2-8-13 Hirotagaya,Kure,Hiroshima 737-0134,Japan
【出 处】
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The 14th International Conference on Microreactivity Technol
论文部分内容阅读
We are developing flow reactor suitable for the direct synthesis of hydrogen peroxide.Recently,we successfully developed the reactor with the size of 12 cm X 18 cm,capable of producing 10 wt%of hydrogen peroxide with 20 g/h.The reactor consists of three layers of glasses and one Si layer: the first layer of glass for catalyst packed bed,the second layer for gas-and liquid-delivery,and the third layer for gas distribution.Si layer was bonded in order to promote heat removal during the reaction,for the direct synthesis of hydrogen peroxide is a highly exothermic reaction.We applied sand blasting,endmilling,and photo processing followed by HF etching depending on the width and accuracy needed for each microchannels1-3.The glass layers were thermally bonded to form one reactor,while Si layer was anodically bonded afterwards.We have named such combination of microfabrication as "Cross-edge" microprocessing technology,our technological platform for fabricating micro(fluidic)devices.We developed the fabrication process based on 8 inch MEMS processing technology.The development was mandatory not only for the reactor fabrication,but also serves better,cost effective microfluidic device fabrication in general.
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