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Composite ZnO/fluorocarbon films were deposited by R.F.sputtering used polytetrafluoroethylene (PTFE) and Zn target on polyethylene terephthalate (PET) substrate.Argon was used as the working gas and oxygen used as reacting gas The composition of deposited films,characterized by SEM,UV-visible spectrophotometer,XPS and static contact angle measurements.The surface morphology of fluorocarbon films and the ZnO/fluorocarbon composite films were observed by means of Scanning Electron Microscopy (SEM).It was found,the surface morphology of composite fluorocarbon/ZnO films vary as the deposited time of ZnO.The growing mode of composite films is a deposited-expansion adhering to the organic core.