The study of biological functional films prepared by plasma processing

• 作 者: WenjuanHu[1]FenyanXie[1]YaboFu[1]QiangChen[1]JingWeng[2]
• 机 构: Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, 102600,Beiji
• 出 处: 9th Asia-Pacific Conference on Plasma Science and Technology
• 发表日期: 2008年期

　　This paper presents the polyethylene oxide (PEO) functional film polymerized by radio frequency plasma-enhanced vapor chemical deposition (RF-PECVD) on p-Si (100) surface with precursor ethylene glycol dimethyl ethe (EGDME) diluted Ar in pulsed plasma mode.We investigate the influences of discharge parameters on the film properties and compounds.The structure of coatings is analyzed by Fourier transform infrared (FTIR) spectroscopy.The water contact angle measurement and atomic force microscope (AFM)are employed to examine the surface polarity and detect morphology, respectively.