【摘 要】
：
In recent years,more and more micro/nano devices are fabricated or commercialized with the rapid development of integrated circuit (IC) and Micro/Nano-Electro-Mechanical System (M/NEMS) technologies.1
【机 构】
：
Department of Physics,Xiamen University,Xiamen,Fujian,361005,China;Pen-Tung Sah Institute of Micro-N
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In recent years,more and more micro/nano devices are fabricated or commercialized with the rapid development of integrated circuit (IC) and Micro/Nano-Electro-Mechanical System (M/NEMS) technologies.1,2 But the lagged pace of the power supply miniaturization hinders the further scaling down or long lasting life of those devices.Among various energy storage systems,the rechargeable lithium ion battery (LIB) is a predominant power source due to its relatively high energy density,absent memory effect and long life time.3 Traditional thin film rechargeable LIBs designed in two dimensional (2D) geometries need large footprint areas to achieve large capacities,resulting in a compromise between the energy and power densities.4 Therefore,many researchers have begun to turn eyes on the 3D LIBs with the higher power and energy densities in a small footprint area.
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