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多步掠射角沉积法制备和掺杂InSb纳米线
【机 构】
：
北京大学纳米器件物理与化学教育部重点实验室、电子学系,北京,100871
【出 处】
：
第二十届全国半导体物理学术会议
【发表日期】
：
2015年7期
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