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The residual stress of zirconia filmson a stainless steel substrate is measured using the digital image correlation (DIC) method.A lattice structure with period of 130nm is milled by focused ion beam (FIB) and used as the deformation carder.An annular groove is etched by FIB in order to release the residual stress.The DIC method is used to calculate the deformation caused by the release of residual stress and the residual stress is derived by mechanics equations.The results demonstrate that this method can be extended for micro-region residual stress measurement of thin films on substrates.