真空电离规中微弱离子流检测技术研究

来源 :中国真空学会2016学术年会 | 被引量 : 0次 | 上传用户：superlhl2010

【摘要】

：

为解决极高真空测量中电离真空规微弱离子流的检测难题，设计采用精密运算放大器组成电流电压转换结构，配合低通滤波、零点调节以及相位补偿等技术，实现了10-14A微弱离子流的准确检测。通过与国内外不同型号电离真空规进行试验测试，验证了该设计电路能够准确检测10-9Pa 极高真空下的电离规离子流，为实现极高真空测量设备国产化提供了技术参考。

【作者】

：

孙健李得天成永军张虎忠王永军

【机构】

：

兰州空间技术物理研究所,甘肃兰州,730000

【出处】

：

中国真空学会2016学术年会

【发表日期】

：

2016年5期

【关键词】

：

极高真空测量微弱离子流检测

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真空电离规中微弱离子流检测技术研究

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