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Inhomogeneous spatial polarization state of vectorial optical field is of importance in biophotonics,communication,single molecule imaging and optical tweezers etc[1].It have been reported that the radial sub-wavelength nanoslits can generate vector field due to the surface plasmon polarization effect[2],but fabrication of nanoslits in gold still remains a daunting challenge.To achieve high quality orbital polarization with high extinction,the width of nanoslits should be below wavelength.Conventional fabrication method for such a structure is to employ electron beam lithography(EBL)in negative tone resist with high sensitivity.