Uniform and tunable palladium nanoparticle is deposited on activated carbon(AC)supports by atomic layer deposition(ALD)using Pd hexafluoroacetylacetonate an
Zn modified HZSM-5 and HY zeolites were synthesized by atomic layer deposition(ALD)using diethylzinc(DEZ)and water as the precursors.Highly dispersed Zn spe