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A new micro-thermoelectric power generator module with high packing density of film thermoelectric legs has been proposed,in which a larger number of p-type and n-type thin-film thermoelectric legs are electrically connected in series.Based on the proposed module,a micro-thermoelectric power generator containing 160 film thermocouples is fabricated by electrodeposition with a size of 25mm (length)×4mm(width)×1mm (thickness).