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原位微区微束分析技术提供了固体物质的元素及同位素组成的空间分布信息,已在地质、环境、考古和材料科学等领域获得了重要的应用。现有的原位微区微束分析技术包括电子探针,同步辐射,全反射微区分析,激光剥蚀-电感耦合等离子体质谱等。原位微区微束分析技术包括点分析和面扫描两种重要的技术,对于点的分析目前相对比较成熟,而对微束面扫描,目前仍存在一些问题。本文拟就地球科学中常用的三种微束(电子探针EMPA、激光剥蚀-电感耦合等离子体质谱LA ICP-MS和X
In situ micro-beam microanalysis technology provides information on the spatial distribution of elements and isotopic compositions of solid materials and has gained important applications in such fields as geology, environment, archeology and materials science. Existing in situ micro-beam micro-beam analysis techniques include electron probe, synchrotron radiation, total reflection micro-area analysis, laser ablation-inductively coupled plasma mass spectrometry. In situ micro-beam microanalysis technique includes two important techniques, point analysis and surface scanning. The analysis of points is relatively mature at present. However, there are still some problems in micro-beam scanning. In this paper, three common microbeams (EMPA, LA-ICP-MS and X