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In his speech Raymond will highlight the unique performance of LYDOP(R) reduced pressure diffusion.Several applications will be underlined, like phosphorous & boron diffusion, LYTOX(R) anneal,drive-in and passivation.The advantages over traditional atmospheric diffusion will be shown.The LYDOP(R) is performing at Ion-Implant process level, having the high throughput and low cost advantage of a diffusion Furnace.