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  5. RF Thermal Plasma Synthesis of Nano-Sized IZTO (Indium Zinc Tin Oxide) Powders with Extremely Reduce

RF Thermal Plasma Synthesis of Nano-Sized IZTO (Indium Zinc Tin Oxide) Powders with Extremely Reduce

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：spaceturtle
【摘 要】
：
A new route to obtain nano-sized IZTO (Indium Zinc Tin Oxide) materials containing reduced indium is investigated using an RF (radio frequency) thermal plasma system.
【作 者】
：
Mi-Yeon Lee Jeong-Soo Kim Jun-Ho Seo 
【机 构】
：
High Enthalpy Plasma Research Center, Chonbuk National University, 664-14, South Korea
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Nano powder TCO ITO IZTO RF Thermal Plasma Indium 
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A new route to obtain nano-sized IZTO (Indium Zinc Tin Oxide) materials containing reduced indium is investigated using an RF (radio frequency) thermal plasma system.
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