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In recent years,micro-/nano-fabrication technology has expended its applications from manufacturing miniaturized mechanical/electrical systems to serving more complex biological/chemical/medical purposes.There are also increasing efforts of employing micro-/nano-technology to create electrical or mechanical power systems that promoted growing research in power-MEMS/NEMS area.In this paper,we will report our work in design and fabricate chemical energy powered high output MEMS system.Two-dimensional room temperature combustion has been successfully achieved on a patterned surface forming a "2D-fire" with a thickness in nanometers.Further discussion will be introduced to understand its scientific significances,and more importantly its potential applications of establishing new class energy system.Such low temperature combustion MEMS-based energy system will have much higher energy conversion efficiency than current high temperature combustion based power system-typically represented by internal combustion engine.