【摘 要】
:
Contents 1.Introduction to Photolithography -Advanced photolithography for Semiconductor LSI -Technology Roadmap for Semiconductors (ITRS) & NGL 2.Photopatterning in Polymer Films - Chemical amplifica
【出 处】
:
2015第十六届中国辐射固化年会暨中国感光学会2015年学术年会
论文部分内容阅读
Contents 1.Introduction to Photolithography -Advanced photolithography for Semiconductor LSI -Technology Roadmap for Semiconductors (ITRS) & NGL 2.Photopatterning in Polymer Films - Chemical amplification [CA] concept:>phototoacid generation,catalytic reactions -Photoresist [PR] polymers for KrF and ArF laser exposure
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