【摘 要】
：
Microwave plasmas are applied very early in industrial production and basic research such as gas breakdown,material surface process and so on,and the method of microwave inducing plasmas has the advan
【机 构】
：
Science and Technology on High Power Microwave laboratory, Institute of Applied Electronics.CAEP, P.
【出 处】
：
13th Asia-Pacific Conference on Plasma Science and Technolog
论文部分内容阅读
Microwave plasmas are applied very early in industrial production and basic research such as gas breakdown,material surface process and so on,and the method of microwave inducing plasmas has the advantages of producing large homogeneous plasmas comparing with DC or AC inductively discharge,arc plasmas.However,HPM (High power microwave) possesses the characteristics of low temperature,non-equilibrium,transient and so on,due to its properties of high peak power,narrow pulse,high repetition and so on.There exists some understanding in characteristic of HPM gas breakdown time,and microwave transmission,through the relative experiments of HPM plasmas and the researches of primary theoretical analyses.
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