Micro-replication using Photoresist Moulds for Wafer-scale Fabrication of Fine-scale Piezocomposites

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户:ADAM129XU
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Background,Motivation and Objective Piezocomposites operating above 30 MHz are in demand to improve spatial resolution for ultrasound imaging and other applications.However,increasing the operational frequency of these materials poses a considerable challenge for conventional dicing techniques,as ultrafine dimensions are required.
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