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Soft machines with novel functionalities are revolutionizing various areas,such as medical devices,field exploration,and prosthetics.Fabrication of soft machines surviving in extreme environment,as well as possessing high performance,is challenging.Soft machines undergo large deformation,multi-field coupled actuation and instabilities during its operation.This paper presents various soft machines made of dielectric elastomer membrane and elastomeric frame.The fabrication of devices,the nonlinear constitutive model and the simulation methods for soft machines are presented.Guided by simulation,the well-designed soft machine demonstrates the characteristics of high survivability,fast actuation and large deformation.