Determination of Trace Elements in Isopropyl Alcohol using the Agilent 4200 MP-AES with EGCM(Externa

来源 :6th Asia-Pacific Winter Conference on Plasma Spectrochemistr | 被引量 : 0次 | 上传用户：buzi899

【摘要】

：

One of the most commonly used organic solvents in the semiconductor industry is isopropyl alcohol(IPA).IPA is frequently analyzed for trace metals as contamination during manufacturing can be detrimen

【作者】

：

Youngjin Kim Phil Lowenstern

【机构】

：

Agilent Technologies Korea Limited Agilent Technologies,Australia Pty Ltd,679 Springvale Road,Mulgra

【出处】

：

6th Asia-Pacific Winter Conference on Plasma Spectrochemistr

【发表日期】

：

2015年5期

【关键词】

：

MP-AES Isopropyl alcohol Semiconductor Contaminant

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Determination of Trace Elements in Isopropyl Alcohol using the Agilent 4200 MP-AES with EGCM(Externa

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