【摘 要】
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Pulsed RF Glow Discharge Optical Emission Spectrometry offers ultra-fast elemental depth profiling capability of thin and thick films with excellent depth resolution allowing quick feedback on process
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Pulsed RF Glow Discharge Optical Emission Spectrometry offers ultra-fast elemental depth profiling capability of thin and thick films with excellent depth resolution allowing quick feedback on process at several stages of LED elaboration.LED are multilayered samples,usually deposited on sapphire.The active layers (Multiple Quantum Well) are extremely thin (a few nm) and are embedded below a GaN layer.
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