Influence of Boron on the Exfoliation Temperature of Hydrogen-implanted Germanium

来源 :The 2nd International Syposium on Innovations in Advanced Ma | 被引量 : 0次 | 上传用户：dy_dj

【作者】

：

Xiaobo Ma Weili Liu Jiayi Xu Xiaofeng Du Chao Chen Zhitang Song Chenglu Lin

【机构】

：

Nano Technology Laboratory,State Key Laboratory of Functional Materials for Informatics,Shanghai Ins

【出处】

：

The 2nd International Syposium on Innovations in Advanced Ma

【发表日期】

：

2008年1期

【关键词】

：

Germanium GOI Boron and hydrogen co-implantation

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Influence of Boron on the Exfoliation Temperature of Hydrogen-implanted Germanium

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